Growth of silver on ZnO and SnO2 thin films intended for low emissivity applications

نویسندگان

  • Rafael Alvarez
  • Juan C. González
  • Juan P. Espinós
  • Agustin R. González
  • Ana Cueva
  • Francisco Villuendas
چکیده

In the present work we have investigated the relationships existing between the optical properties and the growth mechanism, microstructure and surface roughness of SnO2 and ZnO oxide films prepared by magnetron sputtering under conditions resembling those utilized in industry. Thin films of these oxides with different thicknesses were characterized by atomic force microscopy, glancing incidence X-ray diffraction (GIXRD), X-ray reflectometry and spectroscopic Ellipsometry. The roughness evolution of the film properties (density, surface roughness and refraction index) as a function of their thickness has been evaluated within the concepts of the Dynamic Scaling Theory of thin film growth. Zinc oxide films were rougher than tin oxide films of similar *Manuscript Click here to view linked References

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تاریخ انتشار 2012